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Nitrogen trifluoride
Purity specification: 4N6
Packing: 47L/470L/Bundle/ISO
Weight: 20kg/200kg/320kg/4t/6t/8t
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Tel:+86-0310-7182855
Email:718@pericsg.com
Address: No. 1, Weiwu Road, Chemical Industry Cluster, Feixiang District, Handan City, Hebei Province
Email:718@pericsg.com
Address: No. 1, Weiwu Road, Chemical Industry Cluster, Feixiang District, Handan City, Hebei Province
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The main application of nitrogen trifluoride (NF3) on the side of IC:
As perfluorocarbon PFC, which is a gas cleaning agent in the semiconductor industry, is harmful to the environment, it has gradually been replaced by nitrogen trifluoride NF3 in recent years. Using NF3 as a chemical vapor deposition CVD box cleaning agent, compared with perfluorocarbons, can reduce pollutant emissions by about 90%, and can significantly increase the cleaning speed, which can increase the cleaning equipment capacity by about 30%. On the side of LCD: NF3 can also be used as an etchant and also used in the processing of liquid crystal display LCDs. For this reason, the demand for NF3 has increased dramatically in recent years. Solar cells: NF3 is also widely used as an etching and cleaning gas in the solar cell manufacturing industry.
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